عنوان مقاله [English]
نویسندگان [English]چکیده [English]
In this paper, behavior of a lateral comb capacitive micro accelerometer including system noise, sensitivity, and response time has been modeled and improved. Also, dynamic behavior of system has been studied based on three different functions of the input acceleration including the constant, step, and impulse functions. Hence, at first system has been investigated based on the constant input acceleration function and the simulation results has been verified with the experimental results of the existed research. Following, the improved distance between the capacitor plates has been obtained based on the minimum amount of the system total noise. Additionally, sensitivity of system has been maximized by evaluation of the proof mass amount and considering the maximum possible displacement between capacitor plates, as a constraint, to avoid connection of the electrodes. Results show that the distance between capacitor plates was reduced by 90% and the length and width of proof mass were increased by 41.5%. Eventually, sensitivity of the system was doubled. In addition, response time of the system was decreased, significantly. Also, the results of choosing different input functions for input acceleration including the impulse and step functions show that the input function is an effective factor of the model based designing. It changes both the amount of the designing parameters and prediction of the system performance.
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