Modeling of a lateral comb capacitive micro accelerometer system behavior for 1g acceleration

Document Type : Research Paper

Authors

Abstract

In this paper, behavior of a lateral comb capacitive micro accelerometer including system noise, sensitivity, and response time has been modeled and improved. Also, dynamic behavior of system has been studied based on three different functions of the input acceleration including the constant, step, and impulse functions. Hence, at first system has been investigated based on the constant input acceleration function and the simulation results has been verified with the experimental results of the existed research. Following, the improved distance between the capacitor plates has been obtained based on the minimum amount of the system total noise. Additionally, sensitivity of system has been maximized by evaluation of the proof mass amount and considering the maximum possible displacement between capacitor plates, as a constraint, to avoid connection of the electrodes. Results show that the distance between capacitor plates was reduced by 90% and the length and width of proof mass were increased by 41.5%. Eventually, sensitivity of the system was doubled. In addition, response time of the system was decreased, significantly. Also, the results of choosing different input functions for input acceleration including the impulse and step functions show that the input function is an effective factor of the model based designing. It changes both the amount of the designing parameters and prediction of the system performance.

Keywords

Main Subjects

References

[1] Ansel, Y., B. Romanowicz, P. Renaud, G. Schröpfer. "Global model generation for a capacitive silicon accelerometer by finite-element analysis." Sensors and Actuators A: Physical 67 (1998): 153-158.
[2] Tran, T. D., D. V. Dao, T. T .Bui, L. T. Nguyen, T. P. Nguyen, S. Susumu. "Optimum design considerations for a 3-DOF micro accelerometer using nanoscale piezoresistors." Paper presented at the 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Sanya, China, January 6-9, 2008.
[3] Zhang, F., X. He, Zh. Shi, W. Zhou. "Structure Design and Fabrication of Silicon Resonant Micro-accelerometer Based on Electrostatic Rigidity." Paper presented at the World Congress on Engineering, London, UK, July 1-3, 2009.
[4] Kovács, Á., Z. Vı́zváry. "Structural parameter sensitivity analysis of cantilever- and bridge-type accelerometers." Sensors and Actuators A: Physical 89 (3) (2001): 197-205.
[5] Sun, C., C. Wang, W. Fang. "On the sensitivity improvement of CMOS capacitive accelerometer." Sensors and Actuators A: Physical 141 (2008): 347-352.
[6] Gad-el-Hak, M., the MEMs handbook, New York: CRC Press, 2002.
[7] Kumar Mistry, K., S. Siddhartha. "Design of an SOI-MEMS high resolution capacitive type single axis accelerometer." Microsystem Technoly 16 (2010): 2057-2066.
[8] Park, K., C. Lee, H. Jang, Y. Oh, B. Ha. "Capacitive type surface- micromachined silicon accelerometer with stiffness tuning capability." Sensors and Actuators A: Physical 73 (1999): 109-116.
[9] Vakili Amini, B., "Micro-gravity capacitive silicon-on-insulator accelerometers." Journal of Micromechanics and Microengineering 15 (2005): 2113-2120.
[10] Baharodimehr, A., H. Sadeghi. "Capacitive MEMS accelerometer wide range modeling using artificial neural network." Journal of Applied Research  and Technology 7 (2009): 185-192.
[11] Badariah, B. "Mechanical sensitivity enhancement of an area-changed capacitive accelerometer by optimization of the device geometry." Analog Integrated Circuits and Signal Processing 44 (2005): 175-183.
[12] Farahan, H. "Design, Fabrication and analysis of micromachined high sensitivity and 0% cross-axis sensitivity capacitive accelerometers." Microsystem technologies 15 (2009): 1815-1826.
[13] Dowhań, L., A. Wymysłowski, S. Kaliciński, P. Janus. "Numerical prototyping methods in microsystem accelerometers design." Microelectronics Reliability 51 (2011): 1276-1282.
[14] Rao, S. S., Mechanical Vibration. New York: Prentice-Hall, 2010.
Aerospace Knowledge and Technology Journal
Volume 4, Issue 2 - Serial Number 2
January 2016
Pages 45-54

Files

Share

How to cite

Statistics